Toto has been granted a patent for an electrostatic chuck featuring a ceramic dielectric substrate, a base plate, and a gas inlet path. The design includes a bonding part, counterbore, and a ceramic porous component, enhancing gas permeability and clamping efficiency for various applications. GlobalData’s report on Toto gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Toto, Reformer integrated fuel cells was a key innovation area identified from patents. Toto's grant share as of July 2024 was 37%. Grant share is based on the ratio of number of grants to total number of patents.
Electrostatic chuck with ceramic dielectric and gas inlet path
The patent US12074014B2 describes an innovative electrostatic chuck designed for clamping objects, particularly in processing applications. The chuck features a ceramic dielectric substrate with two major surfaces: one for placing the object and the other opposite to it. It is supported by a base plate that includes a bonding part and a gas inlet path extending through both the substrate and the base plate. This gas inlet path consists of multiple hole parts, including a counterbore part that accommodates a ceramic porous component. This porous part is designed to be gas-permeable and features a dense outer portion, which enhances its structural integrity and functionality. The design allows for effective gas flow, crucial for the chuck's operation.
Further claims detail specific configurations of the chuck, such as the alignment of the protruding parts and the dimensions of the various components. The patent also outlines the relationship between the exposed surfaces of the ceramic porous part and the bonding part, ensuring optimal performance. Additionally, the processing apparatus associated with the chuck includes a gas supply mechanism, which is essential for its operation. Overall, the patent presents a comprehensive design aimed at improving the efficiency and effectiveness of electrostatic chucks in various industrial applications.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
